ESE 2021 Jack Keil Wolf Lecture – “MEMS: the Transition from “Four-Letter-Word” to “Trendy””
Glandt Forum, Singh Center for Nanotechnology 3205 Walnut Street, Philadelphia, PA, United StatesThirty years ago, semiconductor manufacturers (wafer fabs) rolled their eyes and muttered under their breath when they heard the word MEMS. Micro-Electromechanical Mechanical Systems are minute mechanical devices built on silicon integrated circuit wafers. They are the microphones, gravity sensors, oscillators, motion sensors, electronic filters in your cell-phone – and more. MEMS processes were “weird”. […]