MEAM Seminar: “Vibrating Beam MEMS Accelerometers for Gravity and Seismic Measurements”
Towne 337Advances in microelectromechanical systems (MEMS) have enabled the widespread development of sensors for a variety of consumer, automotive, and wearable healthcare electronics applications. However, there is increasing interest in the development of highly accurate MEMS inertial sensors for a variety of emerging applications, for e.g., navigation systems for pedestrians and autonomous vehicles, and seismic and […]