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10:00 AM
MEAM Seminar: “Aluminum Scandium Nitride Films for Microelectromechanical Systems Resonator’s Next-Generation Cellular Technology”
Advancements in wireless and sensor technology have resulted in increasing demand for piezoelectric MEMS devices in wireless handsets and base stations, automobile technology, health monitoring sensors, and environmental sensors. Due to its high-quality factor (Q), Young’s modulus, sound velocity, and low mechanical and dielectric losses, AlN is an advantageous resonator material with applications in radio […]
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